• Home > 제품소개 > SEMICONDUCTOR Business > BMD(Bulk Micro Defect Analyzer) > LST-300A
high speed, high depth resolution
detectable particle size : down to 12nm
high depth resolution : 0.5μm
first particle detected within 0.5 μm from
the surface
fully automatic operation including half
wafer handling
image size: 400 μm × 2 mm with measuring
time of 40s
autofocusing on the cleaved surface
whole wafer diameter scan
wafer diameter up to 12 inch
#508,Gyeonggi R&DB Center,906-5,Iui-dong,Yeongtong-gu,Suwon,Gyeonggi-do,443-766,KOREA Tel:031-889-8985(rep,) Fax:031-889-8987
Copyright(c) 2000 by Miru Tech all right reserved
