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| • Home > 제품소개 > BMD(Bulk Micro Defect Analyzer) > DLTS(Deep Level Spectrometer) |
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Highest sensitivity (10 atoms/cm³)
for detection of trace level of contamination |
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Interfacing to a broad range of cryostats |
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complete range of measurement models including
temperature scan, frequency scan,depth prifiling, C-V, I-V characterization,capture
cross section, measurement, optical injection, MOS interface
state density distribution measurement. |
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