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Measurement of wafers conveyor belt does not stop during measurement
incoming wafer inspection and sorting
measurement technic: μ-PCD
sample size:100 to 210mm
Measurement of wafers conveyor belt does not stop during measurement
incoming wafer inspection and sorting
measurement technic:Resistivity -eddy current, Thickness-capacitive gauging
sample size:100 to 210mm

 
Measurement of wafers conveyor belt does not stop during measurement
emitter diffusion monitoring
measurement technic:junction photovoltage
sample size:100 to 210mm
 
 
 
measurement technic: μ-PCD
lifetime is a primary quality control parameter for multi-crystalline block.
block size : up to 210 x 210 x 500 mm
fast,non-contact measurement (single-point,line scan and/or maps)
system dimensions : 1030(I) x 600(W) x 1790(H) mm
without signal tower, computer and monitor
manual and automatic loading by transport belt
cycle time:1.5min including 5linescans
can be conbined Resistivity measurement and p/n type testing
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