• Home > 제품소개 > SEMICONDUCTOR Business > Wafer Tester > Diffusion length(SPV)
monitoring defects and contamination
in the bulk region of Si wafer
impurities due to heavy metal contamination
surface stabilization after HF dip
within 5 min
operation frequency: from 100Hz
to 1600Hz (low frequency is necessary for long Lmeasurements)
can be combined with the μ-PCD,VQ
and JPV
integrated FOUP and minienvironment
#508,Gyeonggi R&DB Center,906-5,Iui-dong,Yeongtong-gu,Suwon,Gyeonggi-do,443-766,KOREA Tel:031-889-8985(rep,) Fax:031-889-8987
Copyright(c) 2000 by Miru Tech all right reserved
measurements)
