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high speed, high resolution mapping of a number of parameters
mobile charge measurement capability
mapping capability electrical oxide thickness and tunneling field
measured parameters :
  - plama damage (by kelvin probe) Vsurf, Dit, Vtunnel
  - oxide and interface characterization (by kelvin-corona- cccSPV) and etc
can be combined with the μ-PCD,SPV and JPV
integrated FOUP and minienvironment


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