• Home > 제품소개 > SEMICONDUCTOR Business > Wafer Tester > Sheet resistance(JPV)
measures sheet resistance
monitor wafer are used
monitor ion implanters, before and
after anneal
totally non-contact & non-destructive
no probe conditioning
excellent correlation with 4PP
excellent repeatability & reproducibility
can be combined with the μ-PCD,SPV
and VQ
integrated FOUP and minienvironment
#508,Gyeonggi R&DB Center,906-5,Iui-dong,Yeongtong-gu,Suwon,Gyeonggi-do,443-766,KOREA Tel:031-889-8985(rep,) Fax:031-889-8987
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