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non-contact epi resistivity monitoring
trusted C-V technique
epi/substrate type: All type(p/p+, n/n+, n/p,
p/p-, n/n+/p+)
resistivity range: 0.1 to 1000 Ω㎝
repeatability and reproducibility: 1%
no monitor wafers
resistivity profile measured
single or dual cassettes
back side or edge grip handling
integrated FOUP and minienvironment
#508,Gyeonggi R&DB Center,906-5,Iui-dong,Yeongtong-gu,Suwon,Gyeonggi-do,443-766,KOREA Tel:031-889-8985(rep,) Fax:031-889-8987
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