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• Wafer Tester
- Lifetime(μ-PCD)
- LBIC
- Resistivity Mapping
- Sheet resistance (JPV)

• In- Line Wafer Tester
- Lifetime
- Block

• Resistivity Tester

• Cell Tester

• Module Tester

• Array Tester

• ETC
 • Charging Damage Monitoring
- CHARM-2 Wafer

• Wafer Tester
- Lifetime (μ-PCD)
- Diffusion length(SPV)
- Capacitance-Voltage(V-Q)
- Sheet resistance(JPV)
- Surface Charge Analyser
- Resistivity for Epi

• Bulk Micro Defect Analyzer
- SIRM-300
- LST-300A

• Deep Level Spectrometer
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